10/2/2011	10:10:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2011	10:10:44 PM	Recipe started at 10:10 PM
10/2/2011	10:10:44 PM	Helium valve closed
10/2/2011	10:10:44 PM	H2 valve closed
10/2/2011	10:10:44 PM	BCl3 valve closed
10/2/2011	10:10:44 PM	PH3 valve closed
10/2/2011	10:10:44 PM	SiCl4 pre valve closed
10/2/2011	10:10:44 PM	SiCl4 post valve closed
10/2/2011	10:10:44 PM	Main Vac valve closed
10/2/2011	10:10:44 PM	Bypass valve closed
10/2/2011	10:10:44 PM	Bubbler valve closed
10/2/2011	10:10:44 PM	Helium MFC set to  0.000000
10/2/2011	10:10:44 PM	H2 MFC set to  0.000000
10/2/2011	10:10:44 PM	BCl3 MFC set to  0.000000
10/2/2011	10:10:44 PM	PHl3 MFC set to  0.000000
10/2/2011	10:10:44 PM	SiCl4 MFC set to  0.000000
10/2/2011	10:10:44 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	10:10:44 PM	Tube furnace set to 0
10/2/2011	10:10:47 PM	H2 valve closed
10/2/2011	10:10:47 PM	BCl3 valve closed
10/2/2011	10:10:47 PM	PH3 valve closed
10/2/2011	10:10:47 PM	SiCl4 pre valve closed
10/2/2011	10:10:47 PM	SiCl4 post valve closed
10/2/2011	10:10:47 PM	Main Vac valve closed
10/2/2011	10:10:47 PM	Bypass valve closed
10/2/2011	10:10:47 PM	Bubbler valve closed
10/2/2011	10:10:47 PM	Helium valve opened
10/2/2011	10:10:47 PM	Helium MFC set to  500.000000
10/2/2011	10:10:47 PM	H2 MFC set to  0.000000
10/2/2011	10:10:47 PM	BCl3 MFC set to  0.000000
10/2/2011	10:10:47 PM	PHl3 MFC set to  0.000000
10/2/2011	10:10:47 PM	SiCl4 MFC set to  0.000000
10/2/2011	10:10:47 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	10:10:48 PM	Tube furnace set to 0
10/2/2011	10:11:53 PM	Helium valve closed
10/2/2011	10:11:53 PM	H2 valve closed
10/2/2011	10:11:53 PM	BCl3 valve closed
10/2/2011	10:11:53 PM	PH3 valve closed
10/2/2011	10:11:53 PM	SiCl4 pre valve closed
10/2/2011	10:11:53 PM	SiCl4 post valve closed
10/2/2011	10:11:53 PM	Main Vac valve closed
10/2/2011	10:11:53 PM	Bypass valve closed
10/2/2011	10:11:53 PM	Bubbler valve closed
10/2/2011	10:11:53 PM	Helium MFC set to  0.000000
10/2/2011	10:11:53 PM	H2 MFC set to  0.000000
10/2/2011	10:11:53 PM	BCl3 MFC set to  0.000000
10/2/2011	10:11:53 PM	PHl3 MFC set to  0.000000
10/2/2011	10:11:53 PM	SiCl4 MFC set to  0.000000
10/2/2011	10:11:53 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	10:11:53 PM	Tube furnace set to 0
10/2/2011	10:11:54 PM	Run finished at 10:11 PM
10/2/2011	10:11:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2011	10:15:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2011	10:15:53 PM	Recipe started at 10:15 PM
10/2/2011	10:15:53 PM	Helium valve closed
10/2/2011	10:15:53 PM	H2 valve closed
10/2/2011	10:15:53 PM	BCl3 valve closed
10/2/2011	10:15:53 PM	PH3 valve closed
10/2/2011	10:15:53 PM	SiCl4 pre valve closed
10/2/2011	10:15:53 PM	SiCl4 post valve closed
10/2/2011	10:15:53 PM	Main Vac valve closed
10/2/2011	10:15:53 PM	Bubbler valve closed
10/2/2011	10:15:53 PM	Bypass valve opened
10/2/2011	10:15:53 PM	Helium MFC set to  0.000000
10/2/2011	10:15:53 PM	H2 MFC set to  0.000000
10/2/2011	10:15:53 PM	BCl3 MFC set to  0.000000
10/2/2011	10:15:53 PM	PHl3 MFC set to  0.000000
10/2/2011	10:15:53 PM	SiCl4 MFC set to  0.000000
10/2/2011	10:15:53 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	10:15:53 PM	Tube furnace set to 0
10/2/2011	10:17:05 PM	Helium valve closed
10/2/2011	10:17:05 PM	H2 valve closed
10/2/2011	10:17:05 PM	BCl3 valve closed
10/2/2011	10:17:05 PM	PH3 valve closed
10/2/2011	10:17:05 PM	SiCl4 pre valve closed
10/2/2011	10:17:05 PM	SiCl4 post valve closed
10/2/2011	10:17:05 PM	Main Vac valve closed
10/2/2011	10:17:05 PM	Bubbler valve closed
10/2/2011	10:17:05 PM	Bypass valve opened
10/2/2011	10:17:05 PM	Helium MFC set to  0.000000
10/2/2011	10:17:05 PM	H2 MFC set to  0.000000
10/2/2011	10:17:05 PM	BCl3 MFC set to  0.000000
10/2/2011	10:17:05 PM	PHl3 MFC set to  0.000000
10/2/2011	10:17:05 PM	SiCl4 MFC set to  0.000000
10/2/2011	10:17:05 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	10:17:05 PM	Tube furnace set to 0
10/2/2011	10:18:05 PM	Helium valve closed
10/2/2011	10:18:05 PM	H2 valve closed
10/2/2011	10:18:05 PM	BCl3 valve closed
10/2/2011	10:18:05 PM	PH3 valve closed
10/2/2011	10:18:05 PM	SiCl4 pre valve closed
10/2/2011	10:18:05 PM	SiCl4 post valve closed
10/2/2011	10:18:05 PM	Bypass valve closed
10/2/2011	10:18:05 PM	Bubbler valve closed
10/2/2011	10:18:05 PM	Main Vac valve opened
10/2/2011	10:18:05 PM	Helium MFC set to  0.000000
10/2/2011	10:18:05 PM	H2 MFC set to  0.000000
10/2/2011	10:18:05 PM	BCl3 MFC set to  0.000000
10/2/2011	10:18:05 PM	PHl3 MFC set to  0.000000
10/2/2011	10:18:05 PM	SiCl4 MFC set to  0.000000
10/2/2011	10:18:05 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	10:18:05 PM	Tube furnace set to 0
10/2/2011	10:18:06 PM	Run finished at 10:18 PM
10/2/2011	10:18:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2011	10:46:04 PM	Recipe started at 10:46 PM
10/2/2011	10:46:04 PM	Helium valve closed
10/2/2011	10:46:04 PM	H2 valve closed
10/2/2011	10:46:04 PM	BCl3 valve closed
10/2/2011	10:46:04 PM	PH3 valve closed
10/2/2011	10:46:04 PM	SiCl4 pre valve closed
10/2/2011	10:46:04 PM	SiCl4 post valve closed
10/2/2011	10:46:04 PM	Main Vac valve closed
10/2/2011	10:46:04 PM	Bypass valve closed
10/2/2011	10:46:04 PM	Bubbler valve closed
10/2/2011	10:46:04 PM	Helium MFC set to  0.000000
10/2/2011	10:46:04 PM	H2 MFC set to  0.000000
10/2/2011	10:46:04 PM	BCl3 MFC set to  0.000000
10/2/2011	10:46:04 PM	PHl3 MFC set to  0.000000
10/2/2011	10:46:04 PM	SiCl4 MFC set to  0.000000
10/2/2011	10:46:04 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	10:46:05 PM	Tube furnace set to 0
10/2/2011	10:46:08 PM	H2 valve closed
10/2/2011	10:46:08 PM	BCl3 valve closed
10/2/2011	10:46:08 PM	PH3 valve closed
10/2/2011	10:46:08 PM	SiCl4 pre valve closed
10/2/2011	10:46:08 PM	SiCl4 post valve closed
10/2/2011	10:46:08 PM	Main Vac valve closed
10/2/2011	10:46:08 PM	Bypass valve closed
10/2/2011	10:46:08 PM	Bubbler valve closed
10/2/2011	10:46:08 PM	Helium valve opened
10/2/2011	10:46:08 PM	Helium MFC set to  500.000000
10/2/2011	10:46:08 PM	H2 MFC set to  0.000000
10/2/2011	10:46:08 PM	BCl3 MFC set to  0.000000
10/2/2011	10:46:08 PM	PHl3 MFC set to  0.000000
10/2/2011	10:46:08 PM	SiCl4 MFC set to  0.000000
10/2/2011	10:46:08 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	10:46:08 PM	Tube furnace set to 0
10/2/2011	10:47:17 PM	H2 valve closed
10/2/2011	10:47:17 PM	BCl3 valve closed
10/2/2011	10:47:17 PM	PH3 valve closed
10/2/2011	10:47:17 PM	SiCl4 pre valve closed
10/2/2011	10:47:17 PM	SiCl4 post valve closed
10/2/2011	10:47:17 PM	Main Vac valve closed
10/2/2011	10:47:17 PM	Bypass valve closed
10/2/2011	10:47:17 PM	Helium valve opened
10/2/2011	10:47:17 PM	Bubbler valve opened
10/2/2011	10:47:17 PM	Helium MFC set to  500.000000
10/2/2011	10:47:17 PM	H2 MFC set to  0.000000
10/2/2011	10:47:17 PM	BCl3 MFC set to  0.000000
10/2/2011	10:47:17 PM	PHl3 MFC set to  0.000000
10/2/2011	10:47:17 PM	SiCl4 MFC set to  0.000000
10/2/2011	10:47:17 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	10:47:17 PM	Tube furnace set to 0
10/2/2011	10:47:47 PM	Helium valve closed
10/2/2011	10:47:47 PM	H2 valve closed
10/2/2011	10:47:47 PM	BCl3 valve closed
10/2/2011	10:47:47 PM	PH3 valve closed
10/2/2011	10:47:47 PM	SiCl4 pre valve closed
10/2/2011	10:47:47 PM	SiCl4 post valve closed
10/2/2011	10:47:47 PM	Main Vac valve closed
10/2/2011	10:47:47 PM	Bubbler valve closed
10/2/2011	10:47:47 PM	Bypass valve opened
10/2/2011	10:47:47 PM	Helium MFC set to  0.000000
10/2/2011	10:47:47 PM	H2 MFC set to  0.000000
10/2/2011	10:47:47 PM	BCl3 MFC set to  0.000000
10/2/2011	10:47:47 PM	PHl3 MFC set to  0.000000
10/2/2011	10:47:47 PM	SiCl4 MFC set to  0.000000
10/2/2011	10:47:47 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	10:47:47 PM	Tube furnace set to 0
10/2/2011	10:48:46 PM	Helium valve closed
10/2/2011	10:48:46 PM	H2 valve closed
10/2/2011	10:48:46 PM	BCl3 valve closed
10/2/2011	10:48:46 PM	PH3 valve closed
10/2/2011	10:48:46 PM	SiCl4 pre valve closed
10/2/2011	10:48:46 PM	SiCl4 post valve closed
10/2/2011	10:48:46 PM	Main Vac valve closed
10/2/2011	10:48:46 PM	Bubbler valve closed
10/2/2011	10:48:46 PM	Bypass valve opened
10/2/2011	10:48:46 PM	Helium MFC set to  0.000000
10/2/2011	10:48:46 PM	H2 MFC set to  0.000000
10/2/2011	10:48:46 PM	BCl3 MFC set to  0.000000
10/2/2011	10:48:46 PM	PHl3 MFC set to  0.000000
10/2/2011	10:48:46 PM	SiCl4 MFC set to  0.000000
10/2/2011	10:48:46 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	10:48:46 PM	Tube furnace set to 0
10/2/2011	10:49:46 PM	Helium valve closed
10/2/2011	10:49:46 PM	H2 valve closed
10/2/2011	10:49:46 PM	BCl3 valve closed
10/2/2011	10:49:46 PM	PH3 valve closed
10/2/2011	10:49:46 PM	SiCl4 pre valve closed
10/2/2011	10:49:46 PM	SiCl4 post valve closed
10/2/2011	10:49:46 PM	Bypass valve closed
10/2/2011	10:49:46 PM	Bubbler valve closed
10/2/2011	10:49:46 PM	Main Vac valve opened
10/2/2011	10:49:46 PM	Helium MFC set to  0.000000
10/2/2011	10:49:46 PM	H2 MFC set to  0.000000
10/2/2011	10:49:46 PM	BCl3 MFC set to  0.000000
10/2/2011	10:49:46 PM	PHl3 MFC set to  0.000000
10/2/2011	10:49:46 PM	SiCl4 MFC set to  0.000000
10/2/2011	10:49:46 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	10:49:46 PM	Tube furnace set to 0
10/2/2011	11:29:46 PM	Helium valve closed
10/2/2011	11:29:46 PM	H2 valve closed
10/2/2011	11:29:46 PM	BCl3 valve closed
10/2/2011	11:29:46 PM	PH3 valve closed
10/2/2011	11:29:46 PM	SiCl4 pre valve closed
10/2/2011	11:29:46 PM	SiCl4 post valve closed
10/2/2011	11:29:46 PM	Bypass valve closed
10/2/2011	11:29:46 PM	Bubbler valve closed
10/2/2011	11:29:46 PM	Main Vac valve opened
10/2/2011	11:29:46 PM	Helium MFC set to  0.000000
10/2/2011	11:29:46 PM	H2 MFC set to  0.000000
10/2/2011	11:29:46 PM	BCl3 MFC set to  0.000000
10/2/2011	11:29:46 PM	PHl3 MFC set to  0.000000
10/2/2011	11:29:46 PM	SiCl4 MFC set to  0.000000
10/2/2011	11:29:46 PM	Bypass solenoid MFC set to  0.000000
10/2/2011	11:29:46 PM	Tube furnace set to 1000
